3D Technology

Integrated Measurement System

3D Technology

LWSI

Large FOV White light Scanning Interferometer

General WSI

(White Light Scanning interferometer)

Large FOV

High Speed Camera &
High Speed Image processing module

Special Illumination Technique

INTEKPLUS的LWSI
为将WSI光学器的3D测量精度应用于High-End产品的量产工序,开发出了改善WSI光学界的LWSI光学器。 通过高分辨率Camera、特殊的Beam splitter和照明,专用 Image Processing模组,完成了高检测性能及增加生产率的系统。
Slit Beam Scanning
  • Single Camera
    Slit Beam Scanning (General Type)
  • Dual Camera
    Slit Beam Scanning (INTEKPLUS Patent)

    INTEKPLUS拥有专利的 Dual Slit Beam Metrology,可无隐藏区域的测定所有检查区域的True 3D

Application of Slit Beam
  • Semiconductor PKG

  • Semiconductor PKG

Phase Measuring Profilometry
Phase Measuring Profilometry (Moire)

搭载加强算法的INTEKPLUS进化技术Phase Measurement Profilometry可精密检测车身表面等宽区域的细微瑕疵。

Basic concept of PMP
Application of PMP
Stereo Camera
Triangulation - 3D
Stereo Camera Triangulation Metrology

INTEKPLUS的Stereo Camera Triangulation Metrology与Real Time image Processing技术及加强算法相结合, 可实时测定True 3D ,并不受对象物的反射度及颜色影响。

  • Real 3D Image + Z map

  • Z map

  • Real 3D Image + Z map

  • Z map